Thin film and nanostructures: growth and characterization

Prof. Carmen Menoni

NSF Center for Extreme Ultraviolet Science and Technology. Colorado State University, USA.

August, 6-12. 2014

Departamento de Física. FCEyN. UBA

Carmen S. Menoni is University Distinguished Professor in the Department of Electrical and Computer Engineering, Department of Chemistry, and the School of Biomedical Engineering at Colorado State University. Prof. Menoni’s research bridges from optics to material science. She is engaged in the growth and characterization of metal-oxides for the engineering of interference coatings for high power lasers. She is also actively involved in using bright soft x-ray laser beams with wavelengths between 10-50 nm for applications such as nanoscale morphological and compositional imaging. Her work has been published in over 200 refereed journal and proceeding papers. Prof. Menoni and her team received in 2008 a “R&D 100 Award” for the invention of a table-top 46.9 nm wavelength microscope that captures flash images with wavelength spatial resolution. Prof. Menoni is Fellow of the Institute of Electrical & Electronic Engineers (IEEE), the Optical Society of America (OSA), the American Physical Society (APS), and the International Society for Optics and Photonics (SPIE). Prof. Menoni is founding editor and present Editor-in-Chief for IEEE Photonics Journal. In 2014-2015 she has been named IEEE Distinguished Lecturer for the Photonics Society.

· Course description

· Grading

· Outline

· Bibliography

Nano printing

Microscopy

Chemical Spectroscopies

Interferometry

Microscopy

Nano Machining

Nano ablation

Plasma Diasnostics

Nano Paterning

Course description

This course introduces students to methodologies employed in the growth of thin films and nanostructures, and to the chemical and physical mechanisms associated with the growth process and their effect in the material’s characteristics. It will cover fundamentals of thin film growth. The breath of the class will be such to attract graduate students from Physics, Chemistry and Materials Science. 

Interesados escribir a: María Gabriela Capeluto, email: maga@df.uba.ar

Grading

Homework – 50 %; Project: 50%

Homework will consist of a combination of critique of papers; calculations, and conceptual problems. The homework will be carried out during the recitation session designed to be an interactive session with the instructor. An important component of this course will be a research project where students will investigate a specific aspect of synthesis and characterization of thin film and nano-structures. Simple modeling or simulations will be required. The project will be discussed in a written report and a in-class 15 minute presentation.

Class Schedule: Lectures 9 -13, Recitation: 14.30 – 18, Monday through Friday

Course outline

Class 1 - Thin Film growth

Laser Pumped SXRL λ= 8.8– 32.6 nm

Fundamentals of condensation, nucleation and growth.

Class 2 - Thin film growth methods

Sputtering

Evaporation

Chemical Vapor Deposition (CVD)

Molecular Beam Epitaxy

Class 3 – Thin film growth diagnostics

Characterization and monitoring

Impact of process conditions on film morphology

Methods of assessment

Class 4 – Photonic structures as interference devices

Fundamental of light propagation

Design of interference coatings for operation from the infrared to the soft x-ray

Class 5 – Semiconductor, and metal nanostructures and their applications

Optical properties

Applications

Bibliography

1) Class Notes by C. S. Menoni,